Faculty Directory

Contact Information: ERF 3055 Phone: (312) 413-7561 Fax: (312) 413-0447 Email: clilley@uic.edu Laboratory: 1100C/D SEL

C. Lilley
Assistant Professor

B.S., General Engineering (1998)
University of Illinois Urbana-Champaign

Ph.D., Theoretical and Applied Mechanics (2003)
Northwestern University

Selected Publications

Carmen M. Hernandez, Todd W. Murray, Sridhar Krishnaswamy, “Photoacoustic characterization of the mechanical properties of thin films,” Applied Physics Letters, Vol. 80, 4, (2002) p. 691.

Research Interests

Dr. Lilley’s major interest is in design and reliability testing of MEMS devices. Part of her research is test and characterization of Microelectromechanical Systems (MEMS) using destructive and nondestructive test methods. Methods to measure the reliability of a MEMS device are needed for successful design and commercialization of MEMS devices. However, reliability assessment of MEMS is currently in the development stage and no test standards exist, although a number of methods have been developed. Clearly, development of experimental techniques for direct-load and remote testing of MEMS structures to study effects of fabrication and aging on the mechanical properties would be highly desirable. In particular, investigating the effects of annealing, chemical and/or crystalline structure of the films, interfaces between layers, stress, aging and failure mechanisms are of interest for reliability assessment.

Laboratory

MEMS Test and Characterization Laboratory
1100C/D SEL